| 000 | 01204cac a22003135a 4500 | ||
|---|---|---|---|
| 005 | 20150805110117.0 | ||
| 008 | 110220t2006 -usa|||fr|||| 001 0 eng d | ||
| 010 | _a 2005050109 | ||
| 020 | _a0849391385 (alk. paper) | ||
| 020 | _a9780849391385 | ||
| 040 |
_aEG-ScBUE _beng _cEG-ScBUE |
||
| 082 | 0 | 4 |
_a621.381 _bMEM _222 |
| 245 | 0 | 0 |
_aMEMS : _bdesign and fabrication / _cedited by Mohamed Gad-el-Hak. |
| 250 | _a2nd ed. | ||
| 260 |
_aBoca Raton, Florida : _bCRC/Taylor & Francis, _cc.2006. |
||
| 300 |
_a[various pagings] : _bill., photos ; _c26 cm. |
||
| 490 | 1 | _aMechanical engineering series | |
| 500 | _aIndex : I1- I17. | ||
| 504 | _aIncludes bibliographical references. | ||
| 590 | _ayassmeen ashraf | ||
| 650 | 0 |
_aMicroelectromechanical systems _xDesign and construction. _922247 _2BUEsh |
|
| 650 | 0 |
_aMicrofabrication. _922248 _2BUEsh |
|
| 651 | _2BUEsh | ||
| 653 |
_bENGGEN _cAugust2015 |
||
| 830 | 0 |
_aMechanical engineering series (Boca Raton, Fla.) _922250 |
|
| 856 | 4 | 1 |
_3Table of contents only _uhttp://www.loc.gov/catdir/toc/fy0702/2005050109.html |
| 856 | 4 | 1 |
_3Publisher description _uhttp://www.loc.gov/catdir/enhancements/fy0668/2005050109-d.html |
| 942 |
_cBB _k621.381MEM _2ddc |
||
| 999 |
_c8000 _d1924 |
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