| 000 | 00949cam a22002778i 4500 | ||
|---|---|---|---|
| 001 | 18491789 | ||
| 005 | 20150315110746.0 | ||
| 008 | 150213s2015 flu b 001 0 eng | ||
| 010 | _a 2015006228 | ||
| 020 | _a9781482232813 (hardback : alk. paper) | ||
| 020 | _a1482232812 (hardback : alk. paper) | ||
| 040 |
_aDLC _beng _cDLC |
||
| 082 | 0 | 0 |
_a621.3950284 _222 _bERA |
| 100 | 1 | _aEranna, G. | |
| 245 | 1 | 0 |
_aCrystal growth and evaluation of silicon for VLSI and ULSI / _cGolla Eranna. |
| 260 |
_aBoca Raton, FL: _bCRC Press, Taylor & Francis, _cc.2015 |
||
| 300 |
_axvii,411 p.: _bill. ; _c24 cm. |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 |
_aIntegrated circuits _xUltra large scale integration _xMaterials. |
|
| 650 | 0 |
_aSilicon crystals _xTesting. |
|
| 650 | 0 | _aCrystal growth. | |
| 650 | 0 |
_aSemiconductor wafers _xMaterials. |
|
| 653 |
_bENGGEN _cMarch2015 |
||
| 655 |
_vreading book _934232 |
||
| 942 | _2ddc | ||
| 999 |
_c19039 _d19011 |
||