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Semiconductor micromachining / edited by S.A. Campbell, H.J. Lewerenz.

By: Contributor(s): Material type: TextTextPublication details: Chichester, England ; New York : Wiley, c1998. c1998.Description: 2 v. : ill. ; 24 cmISBN:
  • 0471966819 (v. 1 : alk. paper)
  • 0471966827 (v. 2 : alk. paper)
  • 0471980846 (set : alk. paper)
Subject(s): DDC classification:
  • 621.38152 CAM
Online resources:
Contents:
v. 1. Fundamental electrochemistry and physics -- v. 2. Techniques and industrial applications.
Catalogued By: Mahitab.
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Holdings
Item type Current library Call number Status Date due Barcode Item holds
Book - Borrowing Book - Borrowing Central Library First floor 621.38152CAM (Browse shelf(Opens below)) Available 000008027
Total holds: 0

Distributer: Al-Ahram.

Includes bibliographical references and index.

v. 1. Fundamental electrochemistry and physics -- v. 2. Techniques and industrial applications.

Catalogued By: Mahitab.

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