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Fundamentals of microelectromechanical systems (MEMS) / Eun Sok Kim.

By: Material type: TextTextPublisher: New York : McGraw-Hill, [2021]Copyright date: ©2021Description: xviii, 396 pages : illustrations (black and white) ; 25 cmContent type:
  • text
  • still image
Media type:
  • unmediated
Carrier type:
  • volume
ISBN:
  • 9781264257584
  • 1264257589
Other title:
  • Microelectromechanical systems (MEMS)
Subject(s): Genre/Form: DDC classification:
  • 621.381 22 KIM
Subject: This textbook is intended for undergraduate seniors and graduate students in electrical, mechanical, and biomedical engineering as well as professional engineers who want to learn MEMS technology. This textbook is aimed to teach design, fabrication and testing of MEMS and contains many questions and problems for the students? homework and exams for the sake of in-depth understanding of MEMS as well as problem-solving and/or design skills in MEMS analysis and design.
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Holdings
Item type Current library Collection Call number Vol info Status Date due Barcode Item holds
Book - Borrowing Book - Borrowing Central Library First floor Baccah 621.381 KIM (Browse shelf(Opens below)) 3726.25 Available 000044761
Total holds: 0

Includes bibliographical references and index.

This textbook is intended for undergraduate seniors and graduate students in electrical, mechanical, and biomedical engineering as well as professional engineers who want to learn MEMS technology. This textbook is aimed to teach design, fabrication and testing of MEMS and contains many questions and problems for the students? homework and exams for the sake of in-depth understanding of MEMS as well as problem-solving and/or design skills in MEMS analysis and design.

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