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		No cover image available Semiconductor micromachining / edited by S.A. Campbell, H.J. Lewerenz. by Campbell, S.A. [ed.] Lewerenz, H.- J Material type: Text Publication details: Chichester, England ; New York : Wiley, c1998. c1998 Online access: Publisher description Table of Contents Availability: Items available for loan: Central Library (1)Call number: 621.38152CAM. Log in to add tags Add to cart (remove)
		MEMS : design and fabrication / edited by Mohamed Gad-el-Hak. Series: Mechanical engineering series (Boca Raton, Fla.) Edition: 2nd ed. Material type: Text; Literary form: Not fiction ; Audience: Specialized; Publication details: Boca Raton, Florida : CRC/Taylor & Francis, c.2006 Online access: Table of contents only Publisher description Availability: Items available for loan: Central Library (2)Call number: 621.381 MEM, ... Log in to add tags Add to cart (remove)
		Microoptics and Nanooptics Fabrication / edited by Shanalyn A. Kemme. by Kemme, Shanalyn A Material type: Text; Format: print ; Literary form: Not fiction Publication details: Boca Raton : CRC Press, c2010 Availability: Items available for loan: Central Library (1)Call number: 621.381045 MIC. Log in to add tags Add to cart (remove)

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