TY  - BOOK
AU  - Kim,Eun Sok
TI  - Fundamentals of microelectromechanical systems (MEMS)
SN  - 9781264257584
U1  - 621.381 22
PY  - 2021///]
CY  - New York
PB  - McGraw-Hill
KW  - Microelectromechanical systems
KW  - BUEsh
KW  - Semiconductors
KW  - Design and construction
KW  - Computer network resources
KW  - Integrated circuits
KW  - Materials
KW  - Reliability
KW  - ENGGEN
KW  - February2023
KW  - Reading book
N1  - Includes bibliographical references and index
N2  - This textbook is intended for undergraduate seniors and graduate students in electrical, mechanical, and biomedical engineering as well as professional engineers who want to learn MEMS technology. This textbook is aimed to teach design, fabrication and testing of MEMS and contains many questions and problems for the students? homework and exams for the sake of in-depth understanding of MEMS as well as problem-solving and/or design skills in MEMS analysis and design
ER  -