Polymers for microelectronics : resists and dielectrics / editors Larry F. Thompson, C. Grant Willson, Seiichi Tagawa.
Material type:
TextPublication details: Washington : American Chemical Society, 1994.Description: xii, 571 p. : ill. ; 24 cmISBN: - 0841227217
- 621.381531 22 POL
| Item type | Current library | Call number | Status | Date due | Barcode | Item holds |
|---|---|---|---|---|---|---|
Book - Borrowing
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Central Library First floor | 621.381531 POL (Browse shelf(Opens below)) | Available | 000046983 |
Total holds: 0
"Developed from a symposium sponsored by the Division of Polymeri Materials: Science and Engineering, Inc., of the American Chemical Society and the Society of Polymer Science, Japan, at the 203rd National Meeting of the American Chemical Society, San Francisco, California, April 5-10, 1992."
Includes bibliographical references and indexes.
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