MARC details
| 000 -LEADER |
|---|
| fixed length control field |
01220nac a22003011u 4500 |
| 010 ## - LIBRARY OF CONGRESS CONTROL NUMBER |
|---|
| LC control number |
97026052 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
0471966819 (v. 1 : alk. paper) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
0471966827 (v. 2 : alk. paper) |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
0471980846 (set : alk. paper) |
| 035 ## - SYSTEM CONTROL NUMBER |
|---|
| System control number |
(DLC) 97026052 |
| 082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.38152 |
| Item number |
CAM |
| 090 ## - LOCALLY ASSIGNED LC-TYPE CALL NUMBER (OCLC); LOCAL CALL NUMBER (OCLC) |
|---|
| -- |
6703 |
| -- |
6703 |
| 100 ## - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Campbell, S.A. [ed.] |
| 245 00 - TITLE STATEMENT |
|---|
| Title |
Semiconductor micromachining / |
| Statement of responsibility, etc |
edited by S.A. Campbell, H.J. Lewerenz. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) |
|---|
| Place of publication, distribution, etc |
Chichester, England ; |
| -- |
New York : |
| Name of publisher, distributor, etc |
Wiley, c1998. |
| Date of publication, distribution, etc |
c1998. |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
2 v. : |
| Other physical details |
ill. ; |
| Dimensions |
24 cm. |
| 500 ## - GENERAL NOTE |
|---|
| General note |
Distributer: Al-Ahram. |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
|---|
| Bibliography, etc |
Includes bibliographical references and index. |
| 505 0# - FORMATTED CONTENTS NOTE |
|---|
| Formatted contents note |
v. 1. Fundamental electrochemistry and physics -- v. 2. Techniques and industrial applications. |
| 511 ## - PARTICIPANT OR PERFORMER NOTE |
|---|
| Participant or performer note |
Catalogued By: Mahitab. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Semiconductors |
| General subdivision |
Design and construction. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Micromachining. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Microfabrication. |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Lewerenz, H.- J. |
| 856 42 - ELECTRONIC LOCATION AND ACCESS |
|---|
| Materials specified |
Publisher description |
| Uniform Resource Identifier |
<a href="http://www.loc.gov/catdir/description/wiley033/97026052.html">http://www.loc.gov/catdir/description/wiley033/97026052.html</a> |
| 856 42 - ELECTRONIC LOCATION AND ACCESS |
|---|
| Materials specified |
Table of Contents |
| Uniform Resource Identifier |
<a href="http://www.loc.gov/catdir/toc/onix03/97026052.html">http://www.loc.gov/catdir/toc/onix03/97026052.html</a> |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Item type |
Book - Borrowing |
| Call number prefix |
621.38152CAM |
| 952 ## - LOCATION AND ITEM INFORMATION (KOHA) |
|---|
| -- |
2007-11-29 |