MARC details
| 000 -LEADER |
|---|
| fixed length control field |
01811cam a22004337a 4500 |
| 001 - CONTROL NUMBER |
|---|
| control field |
14608498 |
| 003 - CONTROL NUMBER IDENTIFIER |
|---|
| control field |
EG-ScBUE |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
|---|
| control field |
20200831134942.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
061024t2002 enka f bd 001 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
0852960395 |
| 035 ## - SYSTEM CONTROL NUMBER |
|---|
| System control number |
(OCoLC)ocm48026089 |
| 040 ## - CATALOGING SOURCE |
|---|
| Original cataloging agency |
UKM |
| Language of cataloging |
eng |
| Description conventions |
rda |
| Transcribing agency |
UKM |
| Modifying agency |
CUS |
| -- |
TXA |
| -- |
OCLCQ |
| -- |
OCL |
| -- |
BAKER |
| -- |
DLC |
| -- |
EG-ScBUE |
| 082 04 - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.38152 |
| Item number |
SIL |
| Edition number |
22 |
| 245 00 - TITLE STATEMENT |
|---|
| Title |
Silicon wafer bonding technology : |
| Remainder of title |
for VLSI and MEMS applications / |
| Statement of responsibility, etc |
edited by Subramanian S. Iyer, IBM microelectronics division, Hopewell Junction, USA and Andre J. Auberton-Hervé, SOITEC, France. |
| 264 #1 - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) |
|---|
| Place of publication, distribution, etc |
London, United Kingdom : |
| Name of publisher, distributor, etc |
INSPEC, |
| Date of publication, distribution, etc |
[2002] |
| 264 #4 - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) |
|---|
| Date of publication, distribution, etc |
c2002 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xxv, 149 pages : |
| Other physical details |
illustrations ; |
| Dimensions |
26 cm. |
| 336 ## - CONTENT TYPE |
|---|
| Source |
rdacontent |
| Content type term |
text |
| Content type code |
txt |
| 337 ## - MEDIA TYPE |
|---|
| Source |
rdamedia |
| Media type term |
unmediated |
| Media type code |
n |
| 338 ## - CARRIER TYPE |
|---|
| Source |
rdacarrier |
| Carrier type term |
volume |
| Carrier type code |
nc |
| 490 0# - SERIES STATEMENT |
|---|
| Series statement |
EMIS processing series ; |
| Volume number/sequential designation |
1 |
| 500 ## - GENERAL NOTE |
|---|
| General note |
Includes glossary. |
| 500 ## - GENERAL NOTE |
|---|
| General note |
Includes appendices. |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
|---|
| Bibliography, etc |
Includes bibliographical references and index. |
| 650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Silicon-on-insulator technology. |
| Source of heading or term |
BUEsh |
| 650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Integrated circuits |
| General subdivision |
Very large scale integration. |
| Source of heading or term |
BUEsh |
| 650 #7 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Microelectromechanical systems. |
| Source of heading or term |
BUEsh |
| 653 ## - INDEX TERM--UNCONTROLLED |
|---|
| Resource For college |
Generalities |
| Arrived date list |
August2020 |
| 655 ## - INDEX TERM--GENRE/FORM |
|---|
| Form subdivision |
Reading book |
| 9 (RLIN) |
34232 |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Iyer, Subramanian S., |
| Relator term |
editor. |
| 9 (RLIN) |
17864 |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Auberton-Hervé, Andre J., |
| Relator term |
editor. |
| 710 2# - ADDED ENTRY--CORPORATE NAME |
|---|
| Corporate name or jurisdiction name as entry element |
Institution of Electrical Engineers, |
| Relator term |
editor. |
| 710 2# - ADDED ENTRY--CORPORATE NAME |
|---|
| Corporate name or jurisdiction name as entry element |
INSPEC. |
| Subordinate unit |
EMIS Group. |
| 856 41 - ELECTRONIC LOCATION AND ACCESS |
|---|
| Materials specified |
Table of contents only |
| Uniform Resource Identifier |
<a href="http://www.loc.gov/catdir/toc/fy0705/2006284940.html">http://www.loc.gov/catdir/toc/fy0705/2006284940.html</a> |
| 856 42 - ELECTRONIC LOCATION AND ACCESS |
|---|
| Materials specified |
Publisher description |
| Uniform Resource Identifier |
<a href="http://www.loc.gov/catdir/enhancements/fy0651/2006284940-d.html">http://www.loc.gov/catdir/enhancements/fy0651/2006284940-d.html</a> |
| 906 ## - LOCAL DATA ELEMENT F, LDF (RLIN) |
|---|
| a |
7 |
| b |
cbc |
| c |
copycat |
| d |
2 |
| e |
ncip |
| f |
20 |
| g |
y-gencatlg |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Source of classification or shelving scheme |
Dewey Decimal Classification |
| Koha item type |
Book - Borrowing |