Normal view MARC view ISBD view

Campbell, S.A. [ed.]

Semiconductor micromachining / edited by S.A. Campbell, H.J. Lewerenz. - Chichester, England ; New York : Wiley, c1998. c1998. - 2 v. : ill. ; 24 cm.

Distributer: Al-Ahram.

Includes bibliographical references and index.

v. 1. Fundamental electrochemistry and physics -- v. 2. Techniques and industrial applications.

Catalogued By: Mahitab.

ISBN: 0471966819 (v. 1 : alk. paper) 0471966827 (v. 2 : alk. paper) 0471980846 (set : alk. paper)

LCCN: 97026052

Subjects--Topical Terms:
Semiconductors--Design and construction.
Micromachining.
Microfabrication.

Dewey Class. No.: 621.38152 / CAM