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Kim, Eun Sok,

Fundamentals of microelectromechanical systems (MEMS) / Microelectromechanical systems (MEMS) Eun Sok Kim. - xviii, 396 pages : illustrations (black and white) ; 25 cm

Includes bibliographical references and index.

This textbook is intended for undergraduate seniors and graduate students in electrical, mechanical, and biomedical engineering as well as professional engineers who want to learn MEMS technology. This textbook is aimed to teach design, fabrication and testing of MEMS and contains many questions and problems for the students? homework and exams for the sake of in-depth understanding of MEMS as well as problem-solving and/or design skills in MEMS analysis and design.

ISBN: 9781264257584 1264257589

Subjects--Topical Terms:
Microelectromechanical systems.
Semiconductors--Design and construction--Computer network resources.
Integrated circuits--Design and construction--Computer network resources.
Semiconductors--Materials--Computer network resources.
Integrated circuits--Reliability--Computer network resources.

Subjects--Index Terms:

Index Terms--Genre/Form: --Reading book

Dewey Class. No.: 621.381 / KIM