Modeling MEMS and NEMS /
Pelesko, John A.
Modeling MEMS and NEMS / John A. Pelesko and David H. Bernstein. - Boca Raton : Chapman & Hall / CRC, 2003. - xxiii, 357 p. : ill. ; 24 cm.
Includes bibliographical references and index.
1584883065
Microelectromechanical systems--Mathematical models.
621.3 / PEL
Modeling MEMS and NEMS / John A. Pelesko and David H. Bernstein. - Boca Raton : Chapman & Hall / CRC, 2003. - xxiii, 357 p. : ill. ; 24 cm.
Includes bibliographical references and index.
1584883065
Microelectromechanical systems--Mathematical models.
621.3 / PEL