Polymers for microelectronics :
Polymers for microelectronics : resists and dielectrics /
editors Larry F. Thompson, C. Grant Willson, Seiichi Tagawa.
- Washington : American Chemical Society, 1994.
- xii, 571 p. : ill. ; 24 cm.
"Developed from a symposium sponsored by the Division of Polymeri Materials: Science and Engineering, Inc., of the American Chemical Society and the Society of Polymer Science, Japan, at the 203rd National Meeting of the American Chemical Society, San Francisco, California, April 5-10, 1992."
Includes bibliographical references and indexes.
0841227217
Microelectronics--Materials--Congresses.
Polymers--Congresses.
621.381531 / POL
"Developed from a symposium sponsored by the Division of Polymeri Materials: Science and Engineering, Inc., of the American Chemical Society and the Society of Polymer Science, Japan, at the 203rd National Meeting of the American Chemical Society, San Francisco, California, April 5-10, 1992."
Includes bibliographical references and indexes.
0841227217
Microelectronics--Materials--Congresses.
Polymers--Congresses.
621.381531 / POL