Crystal growth and evaluation of silicon for VLSI and ULSI /
Eranna, G.
Crystal growth and evaluation of silicon for VLSI and ULSI / Golla Eranna. - Boca Raton, FL: CRC Press, Taylor & Francis, c.2015 - xvii,411 p.: ill. ; 24 cm.
Includes bibliographical references and index.
9781482232813 (hardback : alk. paper) 1482232812 (hardback : alk. paper)
2015006228
Integrated circuits--Ultra large scale integration--Materials.
Silicon crystals--Testing.
Crystal growth.
Semiconductor wafers--Materials.
--Reading book
621.3950284 / ERA
Crystal growth and evaluation of silicon for VLSI and ULSI / Golla Eranna. - Boca Raton, FL: CRC Press, Taylor & Francis, c.2015 - xvii,411 p.: ill. ; 24 cm.
Includes bibliographical references and index.
9781482232813 (hardback : alk. paper) 1482232812 (hardback : alk. paper)
2015006228
Integrated circuits--Ultra large scale integration--Materials.
Silicon crystals--Testing.
Crystal growth.
Semiconductor wafers--Materials.
--Reading book
621.3950284 / ERA