Normal view MARC view ISBD view

Tungsten and other refractory metals for VLSI applications 3 / Editor Victor A. Wells - Pittsburgh, Pa : Materials Research Society, c1988 - 428 p. : ill. ; 24 cm. - Annual - [1] (1985)-

Issue for 1985 includes also proceedings of the 1984 workshop held by the Workshop under its earlier name: Workshop on Tungsten for VLSI Applications.

ISSN: 0886-7860 = Tungsten and other refractory metals for VLSI applications = Tungsten other refract. metals VLSI appl.

Source: Materials Research Society, 9800 McKnight Rd., Suite 327, Pittsburgh, PA 15237

LCCN: 87657562

Subjects--Topical Terms:
Integrated circuits--Very large scale integration--Materials--Congresses.
Tungsten--Congresses.
Heat resistant alloys--Congresses.

LC Class. No.: TK7871.15.T85 / W66a

Dewey Class. No.: 621.395 / TUN