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Nano- and Micro-Electromechanical Systems : Fundamentals of Nano- and Microengineering / Sergey Edward Lyshevski.

by Lyshevski, Sergey Edwa.

Edition: 2nd ed.Material type: Text Text; Literary form: Not fiction Publisher: Boca Raton, Fla. : CRC Press, 2005 c2005Online access: Publisher description Availability: Items available for loan: [Call number: 621.381 LYS] (2).

Foundations of MEMS / Chang Liu.

by Liu, Chang | Mungurwadi, Vaishali B | Nandi, Anil V.

Edition: 2nd ed. / international edition contributions by Vaishali B. Mungurwadi, Anil V. Nandi.Material type: Text Text; Literary form: Not fiction Publisher: Upper Saddle River : Prentice Hall, c2012Availability: Items available for loan: [Call number: 621.3 LIU] (1).

Electromechanics and MEMS / Thomas B. Jones, Nenad G. Nenadic.

by Jones, T. B. (Thomas Byron), 1944- | Nenadic, Nenad G.

Material type: Text Text; Literary form: Not fiction ; Audience: Specialized; Publisher: Cambridge, United Kingdom ; New York, United States : Cambridge University Press, 2013Availability: Items available for loan: [Call number: 621.381 JON] (1).