Tungsten and other refractory metals for VLSI applications 3 / Editor Victor A. Wells
Contributor(s): Materials Research Society | Workshop on Tungsten for VLSI Applications.Material type: Continuing resourceAnalytics: Show analyticsPublisher: Pittsburgh, Pa : Materials Research Society, c1988Description: 428 p. : ill. ; 24 cm.ISSN: 0886-7860.Subject(s): Integrated circuits -- Very large scale integration -- Materials -- Congresses | Tungsten -- Congresses | Heat resistant alloys -- CongressesDDC classification: 621.395 Continued by: Workshop on Tungsten and Other Advanced Metals for VLSI/ULSI Applications. Tungsten and other advanced metals for VLSI/ULSI applications
|Item type||Current location||Collection||Call number||Status||Date due||Barcode||Item holds|
|Book - Borrowing||Central Library First floor||Alef-Baa||621.395 TUN (Browse shelf)||Available||000017082|
Issue for 1985 includes also proceedings of the 1984 workshop held by the Workshop under its earlier name: Workshop on Tungsten for VLSI Applications.
SERBIB/SERLOC merged record