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  • Microelectromechanical systems

Microelectromechanical systems (Topical Term)

Preferred form: Microelectromechanical systems
Used for/see from:
  • MEMS (Microelectromechanical systems)
  • Micro-electro-mechanical systems
  • Micro-machinery
  • Microelectromechanical devices
  • Micromachinery
  • Micromachines
  • Micromechanical devices
  • Micromechanical systems