Jones, T. B. 1944-

Electromechanics and MEMS / Thomas B. Jones, Nenad G. Nenadic. - Cambridge, United Kingdom ; New York, United States : Cambridge University Press, 2013. - xx, 559 p. : ill. ; 26 cm.

Includes appendixes. Index : p. 552-559.

Includes bibliographical references.

Machine generated contents note : 1. Introduction ; 2. Circuit-based modeling ; 3. Capacitive lumped parameter electromechanics ; 4. Small-signal capacitive electromechanical systems ; 5. Electromechanics of piezoelectric elements ; 6. Capacitive sensing and resonant drive circuits ; 7. Distributed 1D and 2D electromechanical structures ; 8. Practical MEMS : pressure transducers, accelerometers and gyroscopes ; 9. Electromechanics of magnetic MEMS devices ; A. Review of quasistatic electromagnetics ; B. Review of mechanical resonators; C. Brief survey of MEMS fabrication ; D. A brief review of solid mechanics ; E. Tables of M- and N-form transducer matrics ; F. Finite element analysis as applied to MEMS.

"Offering a consistent, systematic approach to capacitive, piezoelectric and magnetic MEMS, from basic electromechanical transducers to high-level models for sensors and actuators, this comprehensive textbook equips graduate and senior-level undergraduate students with all the resources necessary to design and develop practical, system-level MEMS models. The concise yet thorough treatment of the underlying principles of electromechanical transduction provides a solid theoretical framework for this development, with each new topic related back to the core concepts. Repeated references to the shared commonalities of all MEMS encourage students to develop a systems-based design perspective. Extensive use is made of easy-to-interpret electrical and mechanical analogs, such as electrical circuits, electromechanical two-port models and the cascade paradigm. Each chapter features worked examples and numerous problems, all designed to test and extend students' understanding of the key principles"

9780521764834 (hardback)


Microelectromechanical systems

--Reading book

621.381 / JON