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Jones, T. B. 1944-

Electromechanics and MEMS / Thomas B. Jones, Nenad G. Nenadic. - Cambridge, United Kingdom ; New York, United States : Cambridge University Press, 2013. - xx, 559 p. : ill. ; 26 cm.

Includes appendixes. Index : p. 552-559.

Includes bibliographical references.

Machine generated contents note : 1. Introduction ; 2. Circuit-based modeling ; 3. Capacitive lumped parameter electromechanics ; 4. Small-signal capacitive electromechanical systems ; 5. Electromechanics of piezoelectric elements ; 6. Capacitive sensing and resonant drive circuits ; 7. Distributed 1D and 2D electromechanical structures ; 8. Practical MEMS : pressure transducers, accelerometers and gyroscopes ; 9. Electromechanics of magnetic MEMS devices ; A. Review of quasistatic electromagnetics ; B. Review of mechanical resonators; C. Brief survey of MEMS fabrication ; D. A brief review of solid mechanics ; E. Tables of M- and N-form transducer matrics ; F. Finite element analysis as applied to MEMS.

"Offering a consistent, systematic approach to capacitive, piezoelectric and magnetic MEMS, from basic electromechanical transducers to high-level models for sensors and actuators, this comprehensive textbook equips graduate and senior-level undergraduate students with all the resources necessary to design and develop practical, system-level MEMS models. The concise yet thorough treatment of the underlying principles of electromechanical transduction provides a solid theoretical framework for this development, with each new topic related back to the core concepts. Repeated references to the shared commonalities of all MEMS encourage students to develop a systems-based design perspective. Extensive use is made of easy-to-interpret electrical and mechanical analogs, such as electrical circuits, electromechanical two-port models and the cascade paradigm. Each chapter features worked examples and numerous problems, all designed to test and extend students' understanding of the key principles"

9780521764834 (hardback)

2012021830


Microelectromechanical systems



--Reading book

621.381 / JON